T-Series

IMPEDANCE AUTO MATCHING NETWORK

FEATURES

l         Auto Matching Networks covering 100KHz-100MHz

l         Fast Initial Matching (about 2sec. Or less)

l         Fast Continuous Matching (instantaneous)

l         Precise Resolution (about 1% or less REF Power)

l         Auto Preset

l         Custom Designs Available

APPLICATION

l         Plasma Etching

l         RIE

l         Plasma CVD

l         RF Sputtering

l         Bias Power Supply

l         Ion Implanting

l         R&D Applications

General

The impedance matching networks are used to maximize power transfer between the RF generator and plasma discharge load for plasmas processing systems.

The plasma impedance can vary over a wide range depending upon a variety of parameters, including electrode construction, gas pressure, gas flow rate, kinds of gas, and RF power.

The “T-series” auto matching networks have an extremely wide tuning range to handle the multi process requirements of today, usually without component changes. Should extra capacitance or inductance be required, ample space has been provided.

Modern semiconductor processes require high speed tuning and resolution. To respond to these requirements, “T-series” auto matching networks are typically able to match in 2 seconds or less with a maximum reflected power of 1 percent to forward power.

RF AND LF MATCHING NETWORKS

Today’s semiconductor systems can require the use not only one 13.56MHz supply, but also lower or higher frequencies in tandem. Often it is required to mix frequencies for delicate processes. To respond to these needs, we can provide auto matching networks covering 100KHz to 100MHz. The lower frequency units cover a wide frequency range and can be used for production line systems as well as R&D.

BUILT-IN/SEPARATE CONTROLLER

The “T-series” matching networks are broken into three families. One uses a separate controller, model RC-11, and the others use two different built-in controllers.

RC-11 Separate Controller

Should the user require an external controller, the “T-series” matching network can be supplied with an RC-11 controller. The controller can be installed at a remote location, such as in a system control rack, for easy access by the operator. Also the size of the matching network can be reduced, since the controller is external.

The RC-11 controller is provided with tune/load position indicators, status indicators, controls and analog remote signals necessary for system control.

Built-in Controller

Should the user require a built-in controller, the matching network can be supplied with a built-in controller “A” or “B”. The built-in controller types require installation space only for the single box.

Built-in Controller Type A

The matching network which has model number with suffix “A” ( ex. ATL-100RA) is supplied with a built-in controller “A”. This matching network can be provided with status indicators on the front panel and analog remote signals necessary for system control but does not have manual control switches and tune/load position indicators. If the customer needs these controls and indicators, we can supply an optional MC-1 manual controller.

Built-in Controller Type B

The matching network which has model number with suffix “B” (ex. TH-10B) is supplied with a built-in controller “B”. This matching network can be provided with almost same tune/load position indicators, status indicators, controls and analog remote signals as RC-11.

CONTROL CIRCUITRY

The features of the Control Circuit:

1.    The matching network uses a pulsed voltage servo motor driving  circuit, which supplies pulsed voltages to the servo motor. The pulse width is controlled by the TUNE or LOAD error signals. This provides extremely high speed matching with precise resolution. The life of the servo motor is enhanced since there is a constant voltage supplied to the motors.

2.    The unit also uses brake circuitry, which brakes the servo motor when TUNE or LOAD is just passing the matching position. This feature prevents oscillation of the TUNE and LOAD motors and stops them at the matching position.

3.    The matching network incorporates an extremely precise sensor circuitry which is controlled by the RF power level. This enables the unit to operate with high resolution over a wider dynamic range of RF power.

4.    *The unit will automatically preset the TUNE and LOAD positions by detecting AC power on, RF Power off, or TUNE and LOAD, reaching thee limits at the same time. This results in hands off operation. This function can be disabled by simply changing jumper plugs.

5.    *TUNE and LOAD position meters are available, which permits easy reading of positions without opening the unit.

6.    *LEDs are used to indicate phase (lead/lag) and magnitude (high/low). Should the network be unable to find a match point, these LEDs will remain lit. This gives the operator visual indications of the matching condition.

7.    LEDs are also provided for TUNE and LOAD limits.

Note: The functions marked with * are not provided with the matching networks with built-in controller type A.

CUSTOM DESIGN MATCHING NETWORK

Besides offering a complete line of standard matching networks, we can also provide custom specific matching networks. Please feel free to consult our factory for your needs.

OPTIONAL ITEMS

l         Phase Shift Controller –2,3 or 4 channel output w/ phase-locked loop

l         Phase Shift Controller – one channel output w/o phase –locked loop

l         DC Bias Voltage Probes

l         RF Voltage Probes

l         Matching transformers for 50-300KHz @1KW and 300KHz-1MHz @1KW

l         Isolation transformers for 50-400KHz @1KW and 400KHz-2MHz @1KW

High Frequency Auto Matching Network w/ Separate Controller RC-11

High Frequency Auto Matching Network w/ Built-in Controller Type B

Low Frequency Auto Matching Network w/ Separate Controller RC-11

Low Frequency Auto Matching Network w/ Built-in Controller Type A

AT SERIES AUTO MATCHING NETWORK

Addition to the “T-series” auto matching networks, we have “AT-Series” auto matching networks in our standard production lines. This series networks are provided with the manual control switches and indicators necessary for operation installed in one box. They do not have a tune/load position indicator and analog signal interface for system, however. They are provided with lower price than “T-series” matching networks.

AT-Series Auto Matching Network w/ Built-in Controller Type AT

MANUAL MATCHING NETWORK

We have the manual matching networks in our standard production line. They are mainly used for small production systems or research and development.

Manual Matching Network

PHASE SHIFT CONTROLLER

We have the manual phase shift controller and auto phase shift controller in our standard production lines.

The manual phase shift controller shifts the phase of input signal from a master generator and delivers to a slave generator. The phase can be shifted by a potentiometer on the front panel from 0 to 360 degrees. This can be used in the systems which do not require phase-locked loop.

The auto phase shift controller automatically shifts the phase of the signal to the slave generator till the phase difference between the signal picked up at the reference electrode and one picked up at the slave electrode coincide with the setpoint given by a potentiometer on the front panel or remote analog signal. The phase can be shifted -180 - 0 - +180 degrees. This can be used in the systems which require phase-locked loop. The auto phase shift controller has a digital phase meter to indicate the phase difference.

Phase Shift Controller